HIGH-RESOLUTION TUNGSTEN PATTERNING USING BUFFERED, MILDLY BASIC ETCHING SOLUTIONS

被引:13
作者
SHANKOFF, TA [1 ]
CHANDROSS, EA [1 ]
机构
[1] BEL TEL LABS INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1149/1.2134198
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:294 / 298
页数:5
相关论文
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