A NOVEL METHOD FOR THE DETERMINATION OF THE ENERGIES OF IMPURITY IONS BOMBARDING A SOLID-SURFACE EXPOSED TO A LOW-PRESSURE PLASMA

被引：5

作者：

GIMZEWSKI, JK ^{[1
]}

VEPREK, S ^{[1
]}

机构：

[1] UNIV ZURICH,INST INORGAN CHEM,CH-8057 ZURICH,SWITZERLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 01期

关键词：

D O I：

10.1116/1.572621

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：35 / 39

页数：5

共 17 条

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