TITANIUM AND ZIRCONIUM NITRIDATION UNDER THE ACTION OF MICROSECOND PULSED TEA CO2-LASER RADIATION IN TECHNICAL NITROGEN

被引：23

作者：

URSU, I ^{[1
]}

MIHAILESCU, IN ^{[1
]}

NISTOR, LC ^{[1
]}

POPA, A ^{[1
]}

POPESCU, M ^{[1
]}

TEODORESCU, VS ^{[1
]}

NANU, L ^{[1
]}

PROKHOROV, AM ^{[1
]}

KONOV, VI ^{[1
]}

TOKAREV, VN ^{[1
]}

UGLOV, SA ^{[1
]}

机构：

[1] PN LEBEDEV PHYS INST,MOSCOW,USSR

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1985年 / 18卷 / 08期

关键词：

D O I：

10.1088/0022-3727/18/8/031

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1693 / 1700

页数：8

共 10 条

[1]

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[3]

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[4] THERMAL-STABILITY OF TITANIUM NITRIDE FOR SHALLOW JUNCTION SOLAR-CELL CONTACTS [J].

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[5] OXIDATION-KINETICS OF ZRN THIN-FILMS [J].

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[6]

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[7]

Samsonov G. V., 1969, NITRIDY NITRIDES

[8] A STUDY OF THE COMPOUNDS WHICH ARE INDUCED ON THE METALLIC TARGET SURFACE UNDER THE ACTION OF A PULSED LASER PLASMATRON [J].

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APOSTOL, I ;

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NISTOR, LC ;

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TOKAREV, VN .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (04) :209-212

[9] ON THE INFLUENCE OF SURFACE CONDITION ON AIR PLASMA FORMATION NEAR METALS IRRADIATED BY MICROSECOND TEA CO2-LASER PULSES [J].

URSU, I ;

APOSTOL, I ;

CRACIUN, D ;

DINESCU, M ;

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[10] TIN AND TAN AS DIFFUSION-BARRIERS IN METALLIZATIONS TO SILICON SEMICONDUCTOR-DEVICES [J].

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