DECOMPOSITION OF LANGMUIR-BLODGETT-FILMS TO FORM METAL-OXIDE LAYERS

被引：21

作者：

AMM, DT

JOHNSON, DJ

MATSUURA, N

LAURSEN, T

PALMER, G

机构：

[1] Department of Physics, Queen's University, Kingston

来源：

THIN SOLID FILMS | 1994年 / 242卷 / 1-2期

基金：

加拿大自然科学与工程研究理事会;

关键词：

D O I：

10.1016/0040-6090(94)90504-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ultraviolet/ozone (UVO) treatment is investigated as a processing step in the fabrication of metal oxide thin films from Langmuir-Blodgett (LB) precursor films. UVO processing was found to reduce LB films to metal carbonates at a rate of approximately 1 min per layer. Subsequent thermal treatment resulted in dense, uniform metal oxide thin films. The structure and composition of these films are studied using ellipsometry, X-ray diffraction, and Rutherford backscattering spectrometry.

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收藏

页码：74 / 77

页数：4

相关论文

共 10 条

[1] FABRICATION OF ULTRATHIN METAL-OXIDE FILMS USING LANGMUIR-BLODGETT DEPOSITION [J].

AMM, DT ;

JOHNSON, DJ ;

LAURSEN, T ;

GUPTA, SK .

APPLIED PHYSICS LETTERS, 1992, 61 (05) :522-524

[2]

CHAN WK, 1990, APPL PHYS LETT, V56, P2132

[3]

DOLITTLE LR, 1985, NUCL INSTRUM METH B, V9, P344

[4] THERMAL-DECOMPOSITION OF OXALATES .16. THERMAL-DECOMPOSITION STUDIES ON CADMIUM OXALATE [J].

FATEMI, NS ;

DOLLIMORE, D ;

HEAL, GR .

THERMOCHIMICA ACTA, 1982, 54 (1-2) :167-180

[5] A MODULAR MULTIFUNCTIONAL LANGMUIR-BLODGETT TROUGH [J].

GRUNFELD, F .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (02) :548-555

[6] LANGMUIR-BLODGETT DEPOSITION OF YTTRIUM ARACHIDATE [J].

JOHNSON, DJ ;

AMM, DT ;

LAURSEN, T ;

GUPTA, SK .

THIN SOLID FILMS, 1993, 232 (02) :245-251

[7] RBS ANALYSIS OF LANGMUIR-BLODGETT-FILMS [J].

LAURSEN, T ;

PALMER, GR ;

AMM, DT ;

JOHNSON, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 82 (01) :125-128

[8] USES OF ULTRAVIOLET OZONE FOR HYDROCARBON REMOVAL - APPLICATIONS TO SURFACES OF COMPLEX COMPOSITION OR GEOMETRY [J].

MCINTYRE, NS ;

DAVIDSON, RD ;

WALZAK, TL ;

WILLISTON, R ;

WESTCOTT, M ;

PEKARSKY, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03) :1355-1359

[9] TOWARD INORGANIC MONOLAYERS INSERTED IN A LANGMUIR-BLODGETT MATRIX [J].

PEREZ, H ;

RUAUDELTEIXIER, A ;

ROULLIAY, M .

THIN SOLID FILMS, 1992, 210 (1-2) :410-411

[10] COMPARATIVE OPTICAL REFLECTION AND MASS-SPECTROMETRY ANALYSIS OF THERMODESORPTION OF LANGMUIR-BLODGETT-FILMS [J].

TIPPMANNKRAYER, P ;

MOHWALD, H ;

SCHRECK, M ;

GOPEL, W .

THIN SOLID FILMS, 1992, 213 (01) :136-142