CARBOTHERMAL SYNTHESIS OF SILICON-NITRIDE - EFFECT OF REACTION CONDITIONS

被引：73

作者：

DURHAM, SJP ^{[1
]}

SHANKER, K ^{[1
]}

DREW, RAL ^{[1
]}

机构：

[1] MCGILL UNIV,DEPT MET ENGN,MONTREAL H3A 2A7,QUEBEC,CANADA

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1991年 / 74卷 / 01期

关键词：

carbothermal reduction; mixing; silicon nitride; synthesis; temperature;

D O I：

10.1111/j.1151-2916.1991.tb07292.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Conditions for carbothermal synthesis of alpha-Si3N4 are presented with special emphasis on the reaction temperature, C:SiO2 ratio, and precursor mixing. With pure precursors, the conversion temperature is 1500-degrees to 1550-degrees-C. An excess of C is necessary for complete conversion, and a simple sol-gel-mixing technique provides excellent intermixing of the precursors. Copious flow of N2 gas throughout the reactor bed is essential if pure Si3N4 is to be produced; small concentrations of CO and O2 promote SiC and Si2N2O, respectively.

引用

页码：31 / 37

页数：7

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