GROWTH OF HIGHLY ORIENTED SNO2 THIN-FILMS ON GLASS SUBSTRATE FROM TETRA-N-BUTYLTIN BY THE SPRAY-PYROLYSIS TECHNIQUE

被引：25

作者：

YAGI, I

HAGIWARA, Y

MURAKAMI, K

KANEKO, S

机构：

[1] KAWAI MUS INSTRUMENTS MFG CO,CTR RES & DEV,HAMAMATSU 430,JAPAN

[2] SHIZUOKA UNIV,ELECTR RES INST,JOHO KU,HAMAMATSU,SHIZUOKA 432,JAPAN

[3] SHIZUOKA UNIV,DEPT MAT SCI & TECHNOL,JOHO KU,HAMAMATSU,SHIZUOKA 432,JAPAN

来源：

JOURNAL OF MATERIALS RESEARCH | 1993年 / 8卷 / 07期

关键词：

D O I：

10.1557/JMR.1993.1481

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Highly oriented SnO2 thin films have been grown successfully from tetra-n-butyltin on heated glass substrates by a pneumatic spraying system. The effects of film growth rate and substrate temperature on the microstructures of the films were investigated by x-ray diffraction and scanning electron microscopy. The SnO2 films of preferentially oriented (110) crystal plane were grown under the optimum growth conditions.

引用

页码：1481 / 1483

页数：3

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