FINITE-ELEMENT SOLUTION OF RAYLEIGH-WAVE SCATTERING FROM REFLECTIVE GRATINGS ON A PIEZOELECTRIC SUBSTRATE

被引:15
作者
HASEGAWA, K [1 ]
KOSHIBA, M [1 ]
机构
[1] HOKKAIDO UNIV,DEPT ELECTR ENGN,SAPPORO,HOKKAIDO 060,JAPAN
关键词
D O I
10.1109/58.46974
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
A numerical approach based on the finite-element method (FEM) is presented for the analysis of Rayleigh-wave scattering from reflective gratings on a piezoelectric substrate. The approach is a combination of the FEM and the analytical method. To treat a large periodic structure in which a repetition of complicated components arises, the substructure method has been introduced. As a result, the mutual interaction between surface waves and bulk waves is automatically taken into account over the entire discontinuity region. In addition, the FEM with Hermitian line elements are also introduced to compute the propagation constants and field distributions of propagating modes in uniform piezoelectric waveguides that arc needed for constructing analytical solutions. To show the validity and usefulness of this approach, examples are computed for various metallic gratings on 128° Y-X LiNbO3 substrate. The computed results agree approximately with the earlier experimental results. © 1990, IEEE.
引用
收藏
页码:99 / 105
页数:7
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