3-DIMENSIONAL MICRO-FLOW MANIFOLDS FOR MINIATURIZED CHEMICAL-ANALYSIS SYSTEMS

被引：58

作者：

VERPOORTE, EMJ ^{[1
]}

VANDERSCHOOT, BH ^{[1
]}

JEANNERET, S ^{[1
]}

MANZ, A ^{[1
]}

WIDMER, HM ^{[1
]}

DEROOIJ, NF ^{[1
]}

机构：

[1] UNIV NEUCHATEL, INST MICROTECHNIQUE, CH-2000 NEUCHATEL, SWITZERLAND

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1994年 / 4卷 / 04期

关键词：

D O I：

10.1088/0960-1317/4/4/009

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A three-dimensional (3D) stack concept for the assembly of photolithographically fabricated microfluidic components is presented and discussed. The system uses silicon-based micropumps and simple planar structures which mimic standard elements of conventional flow systems. Detection is provided either by solid state electrochemical sensors or small volume optical detection. The general advantages of using micromachined flow manifolds for microchemical analysis are addressed. The particular benefits to be derived from this 3D approach compared with other assembly methods are also examined.

引用

页码：246 / 256

页数：11

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