USE OF ELECTRON-BEAM LITHOGRAPHY TO SELECTIVELY DECOMPOSE METALORGANICS INTO PATTERNED THIN-FILM SUPERCONDUCTORS

被引：23

作者：

MANTESE, JV ^{[1
]}

CATALAN, AB ^{[1
]}

HAMDI, AH ^{[1
]}

MICHELI, AL ^{[1
]}

STUDERRABELER, K ^{[1
]}

机构：

[1] UNIV MICHIGAN,DEPT ELECT ENGN & COMP SCI,SOLID STATE ELECTR LAB,ANN ARBOR,MI 48109

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 06期

关键词：

D O I：

10.1063/1.100625

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：526 / 528

页数：3

共 18 条

[1]

AKOH H, 1987, APPL PHYS LETT, V52, P1732

[2] POSSIBLE HIGH-TC SUPERCONDUCTIVITY IN THE BA-LA-CU-O SYSTEM [J].

BEDNORZ, JG ;

MULLER, KA .

ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1986, 64 (02) :189-193

[3] SUPERCONDUCTIVITY UP TO 114-K IN THE BI-AL-CA-SR-CU-O COMPOUND SYSTEM WITHOUT RARE-EARTH ELEMENTS [J].

CHU, CW ;

BECHTOLD, J ;

GAO, L ;

HOR, PH ;

HUANG, ZJ ;

MENG, RL ;

SUN, YY ;

WANG, YQ ;

XUE, YY .

PHYSICAL REVIEW LETTERS, 1988, 60 (10) :941-943

[4] METAL-DEPOSITION BY ELECTRON-BEAM EXPOSURE OF AN ORGANOMETALLIC FILM [J].

CRAIGHEAD, HG ;

SCHIAVONE, LM .

APPLIED PHYSICS LETTERS, 1986, 48 (25) :1748-1750

[5] HIGH-FREQUENCY CHARACTERIZATION OF THIN-FILM Y-BA-CU OXIDE SUPERCONDUCTING TRANSMISSION-LINES [J].

DYKAAR, DR ;

SOBOLEWSKI, R ;

CHWALEK, JM ;

WHITAKER, JF ;

HSIANG, TY ;

MOUROU, GA ;

LATHROP, DK ;

RUSSEK, SE ;

BUHRMAN, RA .

APPLIED PHYSICS LETTERS, 1988, 52 (17) :1444-1446

[6] DIRECT LASER WRITING OF SUPERCONDUCTING PATTERNS OF Y1BA2CU3O7-DELTA [J].

GUPTA, A ;

KOREN, G .

APPLIED PHYSICS LETTERS, 1988, 52 (08) :665-666

[7] FORMATION OF THIN-FILM HIGH-TC SUPERCONDUCTORS BY METALORGANIC DEPOSITION [J].

HAMDI, AH ;

MANTESE, JV ;

MICHELI, AL ;

LAUGAL, RCO ;

DUNGAN, DF ;

ZHANG, ZH ;

PADMANABHAN, KR .

APPLIED PHYSICS LETTERS, 1987, 51 (25) :2152-2154

[8] 100-K SUPERCONDUCTING PHASES IN THE TL-CA-BA-CU-O SYSTEM [J].

HAZEN, RM ;

FINGER, LW ;

ANGEL, RJ ;

PREWITT, CT ;

ROSS, NL ;

HADIDIACOS, CG ;

HEANEY, PJ ;

VEBLEN, DR ;

SHENG, ZZ ;

ELALI, A ;

HERMANN, AM .

PHYSICAL REVIEW LETTERS, 1988, 60 (16) :1657-1660

[9] SUPERCONDUCTIVITY ABOVE 90 K IN THE SQUARE-PLANAR COMPOUND SYSTEM ABA2CU3O6+X WITH A = Y, LA, ND, SM, EU, GD, HO, ER, AND LU [J].

HOR, PH ;

MENG, RL ;

WANG, YQ ;

GAO, L ;

HUANG, ZJ ;

BECHTOLD, J ;

FORSTER, K ;

CHU, CW .

PHYSICAL REVIEW LETTERS, 1987, 58 (18) :1891-1894

[10] QUANTUM INTERFERENCE DEVICES MADE FROM SUPERCONDUCTING OXIDE THIN-FILMS [J].

KOCH, RH ;

UMBACH, CP ;

CLARK, GJ ;

CHAUDHARI, P ;

LAIBOWITZ, RB .

APPLIED PHYSICS LETTERS, 1987, 51 (03) :200-202

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