A MICROWAVE INDUCED PLASMA SYSTEM FOR THE MAINTENANCE OF MODERATE POWER PLASMAS OF HELIUM, ARGON, NITROGEN AND AIR

被引:57
作者
MICHLEWICZ, KG
URH, JJ
CARNAHAN, JW
机构
关键词
D O I
10.1016/0584-8547(85)80087-2
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
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页码:493 / 499
页数:7
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