SPECTRO-ELLIPSOMETRY CHARACTERIZATION OF OPTICAL-QUALITY VAPOR-DEPOSITED DIAMOND THIN-FILMS

被引：44

作者：

CONG, Y

COLLINS, RW

EPPS, GF

WINDISCHMANN, H

机构：

[1] PENN STATE UNIV,DEPT PHYS,UNIVERSITY PK,PA 16802

[2] BP AMER RES CTR,CLEVELAND,OH 44128

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 08期

关键词：

D O I：

10.1063/1.104499

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Quantitative characterizational methods are required to optimize vapor-deposited diamond thin films for optical applications. In this work, spectroellipsometry has been applied to deduce two important characteristics of diamond films: the volume fraction of sp2-bonded defects in the bulk and the thickness of the roughness layer on the surface. We have determined these characteristics versus substrate temperature and CH4:H-2 flow ratio for optical quality films prepared to 1000-4000 angstrom by microwave plasma-assisted chemical vapor deposition. Under optimum conditions, uniform films with approximately 100 angstrom roughness and 3 vol.% bulk sp2C are obtained.

引用

页码：819 / 821

页数：3

共 12 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES
ANGUS, JC
HAYMAN, CC
[J]. SCIENCE, 1988, 241 (4868) : 913 - 921
[2] Aspnes D. E., 1981, Proceedings of the Society of Photo-Optical Instrumentation Engineers, V276, P188
[3] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV
ASPNES, DE
STUDNA, AA
[J]. PHYSICAL REVIEW B, 1983, 27 (02) : 985 - 1009
[4] REAL-TIME AND SPECTROSCOPIC ELLIPSOMETRY CHARACTERIZATION OF DIAMOND AND DIAMOND-LIKE CARBON
COLLINS, RW
CONG, Y
KIM, YT
VEDAM, K
LIOU, Y
INSPEKTOR, A
MESSIER, R
[J]. THIN SOLID FILMS, 1989, 181 : 565 - 578
[5] Edwards D. F., 1985, HDB OPTICAL CONSTANT, P665, DOI DOI 10.1016/B978-0-08-054721-3.50035-6
[6] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE
MATSUMOTO, S
SATO, Y
KAMO, M
SETAKA, N
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04): : L183 - L185
[7] RAMAN-SCATTERING CHARACTERIZATION OF CARBON BONDING IN DIAMOND AND DIAMONDLIKE THIN-FILMS
NEMANICH, RJ
GLASS, JT
LUCOVSKY, G
SHRODER, RE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1988, 6 (03): : 1783 - 1787
[8] SCHRODER RE, 1988, P SOC PHOTO-OPT INS, V969, P79
[9] OPTICAL-CONSTANTS OF A HYDROGENATED AMORPHOUS-CARBON FILM
SMITH, FW
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (03) : 764 - 771
[10] VAPOR GROWTH OF DIAMOND ON DIAMOND AND OTHER SURFACES
SPITSYN, BV
BOUILOV, LL
DERJAGUIN, BV
[J]. JOURNAL OF CRYSTAL GROWTH, 1981, 52 (APR) : 219 - 226

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