ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH AND CHARACTERIZATION OF GAAS/ZN(S,SE) MULTILAYERED STRUCTURES

被引：4

作者：

FUJITA, S ^{[1
]}

MURAWALA, PA ^{[1
]}

MARUO, S ^{[1
]}

TSUJI, O ^{[1
]}

FUJITA, S ^{[1
]}

机构：

[1] SAMCO INT INC,DIV RES & DEV,FUSHIMI KU,KYOTO 612,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1991年 / 30卷 / 1B期

关键词：

GAAS/ZNSSE GROWTH; DISSIMILAR SEMICONDUCTOR MULTILAYERED STRUCTURE; OMVPE; THERMAL STABILITY;

D O I：

10.1143/JJAP.30.L78

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report growth conditions of lattice-matched dissimilar semiconductor multilayered structures of GaAs/Zn(S, Se) systems by organometallic vapor-phase epitaxy (OMVPE). Since the optimum growth temperature for GaAs is much higher than that of Zn(S, Se), we performed low-temperature growth (470 degrees C) of GaAs by photo-assisted OMVPE. A smooth growth surface of GaAs on Zn(S, Se) was achieved by lattice-matching, sufficient preflow of triethylarsenic (TEAs) and a Zn-stabilized surface before starting the growth of GaAs; hence we succeeded in the fabrication of a ZnSSe/GaAs/ZnSSe double hetero (DH) structure and a superlattice. Thermal annealing of the DH structure showed no appreciable Zn diffusion into GaAs up to 650 degrees C but showed thermal stability at the interface up to 550-degrees-C.

引用

页码：L78 / L81

页数：4

共 8 条

[1] INVESTIGATIONS OF PHOTO-ASSOCIATION MECHANISM FOR GROWTH-RATE ENHANCEMENT IN PHOTO-ASSISTED OMVPE OF ZNSE AND ZNS
FUJITA, S
TANABE, A
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ISEMURA, M
FUJITA, S
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[2] GROWTH-RATE ENHANCEMENT BY XENON LAMP IRRADIATION IN ORGANOMETALLIC VAPOR-PHASE EPITAXY OF ZNSE
FUJITA, S
TANABE, A
SAKAMOTO, T
ISEMURA, M
FUJITA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (12): : L2000 - L2002
[3] Fujita S., 1990, Optoelectronics - Devices and Technologies, V5, P41
[4] FUJITA S, 1990, J CRYST GROWTH
[5] GROWTH OF ZNSE/GAAS SUPERLATTICES BY MIGRATION-ENHANCED EPITAXY
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (02): : L236 - L239
[6] KUMAGAI M, 1988, 20TH INT C SOL STAT, P335
[7] MURAWALA PA, 1990, IN PRESS 1990 P INT
[8] LATTICE-MISMATCH ENHANCED DIFFUSION AT A ZNSE/GAAS INTERFACE - INCREASE OF THERMAL-STABILITY IN A LATTICE-MATCHING SYSTEM
OHMI, K
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YAMANISHI, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (12): : L2072 - L2075

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