ATOMIC-COLLISIONS IN SEMICONDUCTORS

被引：1

作者：

SMITH, R ^{[1
]}

WEBB, RP ^{[1
]}

机构：

[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1994年 / 130卷

关键词：

SEMICONDUCTORS; MANY-BODY POTENTIALS; IMPLANTATION; DAMAGE; SPUTTERING;

D O I：

10.1080/10420159408219801

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

Energetic particle bombardment of semi-conductors (Si and GaAs) is studied by means of Molecular Dynamics simulations using many-body potentials. The simulations show that the diamond lattice structures can lead to the trajectories of particles within the crystal being channelled even at low energies. Some results concerning damage production, low energy implantation profiles and angular distributions of ejected particles are presented.

引用

页码：433 / 445

页数：13

共 22 条

[1]

ABELL GC, 1985, PHYS REV B, V35, P6184

[2]

[Anonymous], 1983, RAD EFFECTS COMPUTER

[3]

ARMOUR DG, 1992, COMMUNICATION

[4] RELATIONSHIP BETWEEN THE EMBEDDED-ATOM METHOD AND TERSOFF POTENTIALS [J].

BRENNER, DW .

PHYSICAL REVIEW LETTERS, 1989, 63 (09) :1022-1022

[5] EMBEDDED-ATOM METHOD - DERIVATION AND APPLICATION TO IMPURITIES, SURFACES, AND OTHER DEFECTS IN METALS [J].

DAW, MS ;

BASKES, MI .

PHYSICAL REVIEW B, 1984, 29 (12) :6443-6453

[6] NEW MECHANISM OF DEFECT PRODUCTION IN METALS - A MOLECULAR-DYNAMICS STUDY OF INTERSTITIAL-DISLOCATION-LOOP FORMATION IN HIGH-ENERGY DISPLACEMENT CASCADES [J].

DELARUBIA, TD ;

GUINAN, MW .

PHYSICAL REVIEW LETTERS, 1991, 66 (21) :2766-2769

[7] A SIMPLE EMPIRICAL N-BODY POTENTIAL FOR TRANSITION-METALS [J].

FINNIS, MW ;

SINCLAIR, JE .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1984, 50 (01) :45-55

[8] MANY-BODY EMBEDDED-ATOM POTENTIAL FOR DESCRIBING THE ENERGY AND ANGULAR-DISTRIBUTIONS OF RH ATOMS DESORBED FROM ION-BOMBARDED RH(111) [J].

GARRISON, BJ ;

WINOGRAD, N ;

DEAVEN, DM ;

REIMANN, CT ;

LO, DY ;

TOMBRELLO, TA ;

HARRISON, DE ;

SHAPIRO, MH .

PHYSICAL REVIEW B, 1988, 37 (13) :7197-7204

[9] APPLICATION OF MOLECULAR-DYNAMICS SIMULATIONS TO THE STUDY OF ION-BOMBARDED METAL-SURFACES [J].

HARRISON, DE .

CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1988, 14 :S1-S78

[10] LOW-ENERGY ION IMPACT PHENOMENA ON SINGLE-CRYSTAL SURFACES [J].

HARRISON, DE ;

KELLY, PW ;

GARRISON, BJ ;

WINOGRAD, N .

SURFACE SCIENCE, 1978, 76 (02) :311-322

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