A REVIEW OF OPTICAL ACTUATORS AND THE IMPACT OF MICROMACHINING

被引：6

作者：

JONES, BE

MCKENZIE, JS

机构：

[1] The Brunel Centre for Manufacturing Metrology, Brunel University, Uxbridge

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷

关键词：

D O I：

10.1016/0924-4247(93)80035-F

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Optically powered fluid actuators are under development, for example, those using the photoacoustic and photothermal effects in closed cells and laminar proportional amplifiers (LPA). A number of the devices could be improved by a reduction in size of certain elements of the actuators, and already silicon micromachining is enabling this miniaturization to be achieved. Some important optical actuators and effects are reviewed in this paper and the prospects for improvements are discussed.

引用

页码：202 / 207

页数：6

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