NEW MATERIAL FOR THE PRODUCTION OF FINE LINE INTERCONNECTS IN INTEGRATED-CIRCUIT TECHNOLOGY

被引：11

作者：

BERRY, GJ ^{[1
]}

CAIRNS, JA ^{[1
]}

THOMSON, J ^{[1
]}

机构：

[1] UNIV DUNDEE,DEPT CHEM,DUNDEE DD1 4HN,SCOTLAND

来源：

关键词：

D O I：

10.1007/BF00639302

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：844 / 846

页数：3

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