ELECTRONIC SPUTTERING OF LOW-TEMPERATURE MOLECULAR-SOLIDS

被引:114
作者
BROWN, WL [1 ]
AUGUSTYNIAK, WM [1 ]
MARCANTONIO, KJ [1 ]
SIMMONS, EH [1 ]
BORING, JW [1 ]
JOHNSON, RE [1 ]
REIMANN, CT [1 ]
机构
[1] UNIV VIRGINIA, DEPT ENGN PHYS, CHARLOTTESVILLE, VA 22903 USA
关键词
D O I
10.1016/0168-583X(84)90085-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:307 / 314
页数:8
相关论文
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