REENTRANT CAVITY AS A LOW-POWER PLASMA SOURCE

被引：6

作者：

BROWN, MR

SHERIDAN, TE

HAYES, MA

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1986年 / 57卷 / 12期

关键词：

D O I：

10.1063/1.1139023

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：2957 / 2960

页数：4

共 11 条

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[6]

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[7] ELECTROSTATIC MAGNETOSTATIC HYBRID PROBE FOR MEASURING THE ELECTRON-DISTRIBUTION FUNCTION IN A MAGNETIZED PLASMA [J].

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[9] SIMPLE LOW-COST MICROWAVE PLASMA SOURCE [J].

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[10]

SLATER JS, 1963, MICROWAVE ELECTRONIC

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