OPTIMIZATION OF EPITAXIAL QUALITY IN SPUTTERED FILMS OF FERROELECTRIC BISMUTH TITANATE

被引:12
作者
TAKEI, WJ [1 ]
WU, SY [1 ]
FRANCOMBE, MH [1 ]
机构
[1] WESTINGHOUSE RES LABS,PITTSBURGH,PA 15235
关键词
D O I
10.1016/0022-0248(75)90234-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:188 / 198
页数:11
相关论文
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