MEASUREMENT OF CONDUCTANCE OF A POROUS PLUG AND ITS USE FOR THE CALIBRATION OF VACUUM GAUGES

被引:3
作者
SHARMA, JKN
MOHAN, P
机构
关键词
D O I
10.1016/0042-207X(88)90011-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:511 / 517
页数:7
相关论文
共 25 条
[1]  
[Anonymous], INSTRUCTION MANUAL S
[2]  
BLEARS J, 1964, PRESSURE MEASUREMENT, P174
[3]   THE PUMPING SPEED OF A CIRCULAR APERTURE IN A DIAPHRAGM ACROSS A CIRCULAR TUBE [J].
BUREAU, AJ ;
LASLETT, LJ ;
KELLER, JM .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1952, 23 (12) :683-686
[4]  
CALCATELLI A, 1974, JPN J APPL PHYS PT 1, V2, P127
[5]  
Carman P. C., 1956, FLOW GASES POROUS ME
[6]   AN EVALUATION OF PERFORMANCE OF GAS FLOW METERS WHICH USE A POROUS MEMBRANE AS CONTROL ELEMENT [J].
CHRISTIA.RG ;
LECK, JH ;
WERNER, JG .
VACUUM, 1966, 16 (11) :609-&
[7]   USE OF A SILICON CARBIDE POROUS PLUG FOR CONTROL OF GAS FLOW INTO A VACUUM SYSTEM DOWN TO 1 MU1 TORR SEC -1 [J].
CHRISTIAN, RG ;
LECK, JH .
JOURNAL OF SCIENTIFIC INSTRUMENTS, 1966, 43 (04) :229-+
[8]   DESIGN AND STUDY OF A COMPACT BAKEABLE ULTRAHIGH-VACUUM SYSTEM FOR CALIBRATING ABSOLUTELY LOW-PRESSURE GAUGES [J].
CLOSE, KJ ;
VAUGHANWATKINS, RS ;
YARWOOD, J .
VACUUM, 1977, 27 (09) :511-517
[9]  
DUSHMAN S, 1962, SCI F VACUUM TECHNIQ
[10]  
HOJO H, 1977, 7TH P INT VAC C 3RD, P117