USE OF IN-ZN-AS TERNARY SOURCES FOR THE DIFFUSION OF ZN IN GAAS BY THE SEMICLOSED-BOX METHOD

被引:2
作者
LAUNAY, F
KAZMIERSKI, K
HUBER, A
DECREMOUX, B
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 06期
关键词
D O I
10.1143/JJAP.25.813
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:813 / 817
页数:5
相关论文
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