CHANGE IN REFRACTIVE-INDEX AND IN CHEMICAL-STATE OF ELECTRON-BEAM IRRADIATED FLUORINATED POLYIMIDE FILMS

被引：10

作者：

MARUO, YY ^{[1
]}

SASAKI, S ^{[1
]}

TAMAMURA, T ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, OPTOELECTR LABS, ATSUGI, KANAGAWA 24301, JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1995年 / 13卷 / 06期

关键词：

D O I：

10.1116/1.579701

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The refractive index of fluorinated polyimide is increased by electron beam irradiation. The degree of refractive index change can be controlled by adjusting the dose of the electron beam. The depth of the refractive index change depends on the energy of the beam. X-ray photoelectron spectroscopy (XPS), secondary ion mass spectroscopy (SIMS), and surface profile measurement of electron beam irradiated fluorinated polyimide film were carried out to investigate the causes of the refractive index increase. The surface profile measurement indicated that the polyimide volume was decreased by an electron beam irradiation. The XPS and SIMS showed that electron beam irradiation decreases the fluorine content. The main cause of the refractive index increase is thought to be this decrease in fluorine content and volume. (C) 1995 American Vacuum Society.

引用

页码：2758 / 2763

页数：6

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