LATTICE DISTORTION INDUCED BY SCRATCHING ON SURFACE OF SILICON SINGLE-CRYSTAL WAFER

被引：6

作者：

SUNADA, J ^{[1
]}

机构：

[1] CHIBA UNIV,FAC EDUC,CHIBA,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1974年 / 13卷 / 12期

关键词：

D O I：

10.1143/JJAP.13.1944

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：1944 / 1954

页数：11

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共 18 条

[1] ON A NEW MODE OF DEFORMATION IN INDIUM ANTIMONIDE
ALLEN, JW
[J]. PHILOSOPHICAL MAGAZINE, 1959, 4 (45): : 1046 - 1054
[2] INDENTATION OF GERMANIUM AT ROOM TEMPERATURE
CRAIG, JV
PUGH, EN
[J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (11) : 3417 - &
[3] A STUDY OF STRAINS IN ABRADED DIAMOND SURFACES
FRANK, FC
LAWN, BR
LANG, AR
WILKS, EM
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1967, 301 (1466) : 239 - +
[4] FUJIWARA ST, 1963, J PHYS SOC JAPAN, V18, P1763
[5] FUJIWARA T, 1964, JPN J APPL PHYS, V3, P129
[6] Fujiwara T., 1963, MEMO, V2, P127
[7] SUR DEUX VARIANTES DE LA METHODE DE LAUE ET LEURS APPLICATIONS
GUINIER, A
TENNEVIN, J
[J]. ACTA CRYSTALLOGRAPHICA, 1949, 2 (03): : 133 - &
[8] DAMAGE PRODUCED IN GE AT ROOM TEMPERATURE BY INDENTATION
JOHNSON, OW
[J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (07) : 2521 - &
[9] NATURE OF DEFORMATION AROUND PRESSURE CRACKS ON DIAMOND
LAWN, BR
KOMATSU, H
[J]. PHILOSOPHICAL MAGAZINE, 1966, 14 (130): : 689 - &
[10] HERTZIAN FRACTURE IN SINGLE CRYSTALS WITH DIAMOND STRUCTURE
LAWN, BR
[J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (10) : 4828 - +