DEPOSITION OF THIN-FILMS BY BEAM INDUCED POLYMERIZATION OF DIVINYL BENZENE

被引:3
作者
FRITZSCHE, CR
机构
[1] Fraunhofer-Institut für Angewandte Festkörperphysik, D-7800 Freiburg, Germany
关键词
D O I
10.1063/1.330415
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:9053 / 9057
页数:5
相关论文
共 7 条
[1]   ELECTRON-BEAM-DEPOSITED THIN POLYMER FILM - ELECTRICAL PROPERTIES VS BOMBARDING CURRENT [J].
BABCOCK, LE ;
CHRISTY, RW .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) :1423-&
[2]   FORMATION OF THIN POLYMER FILMS BY ELECTRON BOMBARDMENT [J].
CHRISTY, RW .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (09) :1680-1683
[3]   CONTROLLED FORMATION OF THIN POLYMER-FILMS BY ELECTRON-IRRADIATION [J].
ELOVIKOV, SS ;
NOVOJILOV, VP ;
USHAKOV, NV .
THIN SOLID FILMS, 1979, 62 (03) :303-316
[4]  
GREGOR VV, 1966, PHYS THIN FILMS, V3, P131
[5]   POLYMERIZATION OF BUTADIENE GAS ON SURFACES UNDER LOW ENERGY ELECTRON BOMBARDMENT [J].
HALLER, I ;
WHITE, P .
JOURNAL OF PHYSICAL CHEMISTRY, 1963, 67 (09) :1784-&
[6]   MATERIALS AND TECHNIQUES USED IN NANOSTRUCTURE FABRICATION [J].
MOLZEN, WW ;
BROERS, AN ;
CUOMO, JJ ;
HARPER, JME ;
LAIBOWITZ, RB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :269-272
[7]  
1979, HDB CHEM PHYSICS, pF233