FORMATION OF IONS IN SPUTTERING

被引:61
作者
SROUBEK, Z
机构
关键词
D O I
10.1016/0584-8547(89)80035-7
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
引用
收藏
页码:317 / 328
页数:12
相关论文
共 69 条
[1]   SECONDARY ION EMISSION FROM DIELECTRIC FILMS AS A FUNCTION OF PRIMARY ION VELOCITY [J].
ALBERS, A ;
WIEN, K ;
DUCK, P ;
TREU, W ;
VOIT, H .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 198 (01) :69-74
[2]   KINETIC ELECTRON-EMISSION FROM SOLIDS INDUCED BY SLOW HEAVY-IONS [J].
ALONSO, EV ;
ALURRALDE, MA ;
BARAGIOLA, RA .
SURFACE SCIENCE, 1986, 166 (2-3) :L155-L160
[3]   ELECTRON-HOLE PAIR CREATION BY ATOMIC SCATTERING AT SURFACES [J].
AMIRAV, A ;
CARDILLO, MJ .
PHYSICAL REVIEW LETTERS, 1986, 57 (18) :2299-2302
[4]   DEVELOPMENTS IN SECONDARY ION MASS-SPECTROSCOPY AND APPLICATIONS TO SURFACE STUDIES [J].
BENNINGHOVEN, A .
SURFACE SCIENCE, 1975, 53 (DEC) :596-625
[5]  
BENNINGHOVEN A, 1983, SPRINGER SERIES CHEM, V25
[6]  
BERNHEIM M, 1987, PARTICLE PHOTON INTE, P94
[8]   EXPERIMENTAL AND THEORETICAL APPROACHES TO THE IONIZATION PROCESS IN SECONDARY-ION EMISSION [J].
BLAISE, G ;
NOURTIER, A .
SURFACE SCIENCE, 1979, 90 (02) :495-547
[9]   LOCALIZED TIME-DEPENDENT PERTURBATIONS IN METALS - FORMALISM AND SIMPLE EXAMPLES [J].
BLANDIN, A ;
NOURTIER, A ;
HONE, DW .
JOURNAL DE PHYSIQUE, 1976, 37 (04) :369-378
[10]   SECONDARY-ION EMISSION FROM CLEAN AND OXIDIZED ALUMINUM AS A FUNCTION OF INCIDENT ION MASS AND ENERGY [J].
BLAUNER, PG ;
WELLER, RA .
PHYSICAL REVIEW B, 1987, 35 (04) :1492-1499