VAPOR-DEPOSITED THIN-FILM PIEZOELECTRIC TRANSDUCERS

被引：95

作者：

DEKLERK, J

KELLY, EF

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1965年 / 36卷 / 04期

关键词：

D O I：

10.1063/1.1719610

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：506 / &

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