MASS SELECTION OF NEUTRAL CLUSTERS IN LOW-ENERGY CLUSTER BEAM DEPOSITION EXPERIMENTS - IS IT REALISTIC

被引:14
作者
ROUX, JF
CABAUD, B
FUCHS, G
GUILLOT, D
HOAREAU, A
MELINON, P
机构
[1] Département de Physique des Matériaux, UA CNRS 172, Université Claude Bernard Lyon I, 69622 Villeurbanne Cedex
关键词
D O I
10.1063/1.110892
中图分类号
O59 [应用物理学];
学科分类号
摘要
The crucial problem in controlling and filtering the size of free neutral clusters generated by a cluster source is studied in the particular case of the Sattler source type. The present work shows that a velocity selector can be used to control the size of neutral clusters produced in the low-energy cluster beam deposition system. This velocity selector is also used to measure the kinetic energy of free Bi clusters. The experimental results obtained for Bi clusters are compared with previous theoretical predictions.
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页码:1212 / 1214
页数:3
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