TIME-RESOLVED X-RAY-DIFFRACTION MEASUREMENT OF THE TEMPERATURE AND TEMPERATURE-GRADIENTS IN SILICON DURING PULSED LASER ANNEALING

被引:66
作者
LARSON, BC
WHITE, CW
NOGGLE, TS
BARHORST, JF
MILLS, DM
机构
[1] CORNELL UNIV,SCH APPL & ENGN PHYS,ITHACA,NY 14850
[2] CORNELL UNIV,HIGH ENERGY SYNCHROTRON SOURCE,ITHACA,NY 14850
关键词
D O I
10.1063/1.93880
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:282 / 284
页数:3
相关论文
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