DEVELOPMENT OF INDUSTRIAL ION-IMPLANTATION AND ION ASSISTED COATING PROCESSES - A PERSPECTIVE

被引：7

作者：

LEGG, KO

SOLNICKLEGG, H

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(89)91046-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：562 / 566

页数：5

共 17 条

[1] METAL VAPOR VACUUM-ARC ION-SOURCE [J].

BROWN, IG ;

GALVIN, JE ;

GAVIN, BF ;

MACGILL, RA .

[2]

Burnett P. J., 1984, Ion Implantation and Ion Beam Processing of Materials. Proceedings of the Symposium, P401

[3]

CONRAD JR, 1988, IN PRESS J APPL PHYS

[4]

DEARNALEY G, 1980, ION IMPLANTATION MET, P1

[5]

DEARNALEY G, 1987, APR P INT C MET COAT

[6]

GARDNER PR, 1987, SURF ENG, V3, P203

[7]

HARTLEY NEW, 1976, I PHYS C SER, V28, P210

[8]

Hirvonen J. K., 1984, Ion Implantation and Ion Beam Processing of Materials. Proceedings of the Symposium, P621

[9] MEASUREMENT OF THIN-FILM ADHESION [J].

HULL, TR ;

COLLIGON, JS ;

HILL, AE .

[10]

OLIVER WC, 1989, IN PRESS ION IMPLANT