AN ULTRAHIGH-VACUUM ANGULAR ENCODER WITH MICRORADIAN RESOLUTION

被引:2
作者
RIFE, JC
机构
关键词
D O I
10.1016/0167-5087(84)90545-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
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页码:279 / 283
页数:5
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