BIAS VOLTAGE EFFECT ON ELECTRICAL-RESISTIVITY OF GDCO AMORPHOUS SPUTTERED FILMS

被引:5
作者
HONDA, S
OHKOSHI, M
KUSUDA, T
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D O I
10.1016/0304-8853(83)90507-3
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T [工业技术];
学科分类号
08 ;
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页码:238 / 240
页数:3
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