PREPARATION OF SILICON-CARBIDE POWDERS BY CHEMICAL VAPOR-DEPOSITION OF THE SIH4-CH4-H2 SYSTEM

被引：23

作者：

CHEN, L

GOTO, T

HIRAI, T

机构：

来源：

关键词：

D O I：

10.1007/BF01168942

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3824 / 3830

页数：7

共 19 条

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