RELIABILITY OF A CAPACITANCE MANOMETER IN RANGE 2X10(-4)-5X10(-6)TORR

被引：30

作者：

LORIOT, G ^{[1
]}

MORAN, T ^{[1
]}

机构：

[1] UNIV CONNECTICUT,DEPT PHYS,STORRS,CT 06268

来源：

关键词：

D O I：

10.1063/1.1134157

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：140 / 143

页数：4

共 6 条

[1] Gaede W, 1915, ANN PHYS-BERLIN, V46, P357
[2] MEINKE C, 1962, VAKUUMTECH, V11, P86
[3] ON CALCULATION OF THERMAL TRANSPIRATION
MILLER, GA
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1963, 67 (06) : 1359 - &
[4] AVOIDING ERRONEOUS SUBMICRON PRESSURE READINGS - REFRIGERATED MCLEOD
ROTHE, EW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1964, 1 (02): : 66 - &
[5] STANDARDS AND VACUUM MEASUREMENT ACCURACY
RUTHBERG, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 186 - &
[6] UTTERBACK NG, 1966, REV SCI INS, V37