ABERRATIONS OF EMISSION CATHODES - NANOMETER DIAMETER FIELD-EMISSION ELECTRON SOURCES

被引:37
作者
SCHEINFEIN, MR
QIAN, W
SPENCE, JCH
机构
[1] Department of Physics and Astronomy, Arizona State University, Tempe
关键词
D O I
10.1063/1.353151
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electron optical properties of nanometer sized field-emission cathodes are examined for suitability as electron sources for low-voltage scanning electron microscopy, low-voltage transmission point projection microscopy, and low-voltage transmission and reflection electron holography. First-order electron optical properties, aperture and chromatic aberrations, and source coherence are computed using an all-orders numerical method, and compared with analytically computed properties where possible. The electron optical properties of planar emitters, conventional field-emission tips, and new nanotip structures are compared in the absence of space-charge effects. It is found that the spherical and chromatic aberrations of nanotips are dominated by their base structures and that beams produced by nanotips can be considered as totally coherent.
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页码:2057 / 2068
页数:12
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