MONOLITHIC INGAAS PHOTODIODE ARRAY ILLUMINATED THROUGH AN INTEGRATED WAVE-GUIDE

被引：17

作者：

TROMMER, R

机构：

[1] Siemens Research Lab, Munich, West Ger, Siemens Research Lab, Munich, West Ger

来源：

ELECTRONICS LETTERS | 1985年 / 21卷 / 09期

关键词：

WAVEGUIDES; OPTICAL; -; Manufacture;

D O I：

10.1049/el:19850272

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A linear array of InGaAs PIN photodiodes has been fabricated which can be illuminated through a slab waveguide from the opposite side of the InP substrate via total reflection at a V-groove mirror. Absorption losses in the double-heterostructure waveguide are 2. 5 db/cm. The internal quantum efficiency of the photodiodes, including the mirror loss, is 87%, and an optical crosstalk between the diodes better than minus 40 db was measured.

引用

页码：382 / 383

页数：2