A COMPARATIVE-STUDY OF THE DOPANT PROFILES IN DIFFUSED PLANAR OPTICAL-WAVEGUIDES BY SIMS AND GUIDED WAVE PROBE

被引：8

作者：

BETTS, RA

PITT, CW

RIDDLE, KR

WALPITA, LM

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1983年 / 31卷 / 01期

关键词：

D O I：

10.1007/BF00617185

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：29 / 35

页数：7

共 22 条

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[10]

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