A COMPARATIVE-STUDY OF THE DOPANT PROFILES IN DIFFUSED PLANAR OPTICAL-WAVEGUIDES BY SIMS AND GUIDED WAVE PROBE

被引:8
作者
BETTS, RA
PITT, CW
RIDDLE, KR
WALPITA, LM
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1983年 / 31卷 / 01期
关键词
D O I
10.1007/BF00617185
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
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收藏
页码:29 / 35
页数:7
相关论文
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