ELLIPSOMETRIC AND OPTICAL STUDY OF AMORPHOUS HYDROGENATED CARBON-FILMS

被引：13

作者：

ALTEROVITZ, SA

WARNER, JD

LIU, DC

POUCH, JJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 11期

关键词：

D O I：

10.1149/1.2108403

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2339 / 2342

页数：4

共 20 条

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ALTEROVITZ, SA ;

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LIU, DC .

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ALTEROVITZ, SA ;

BUABBUD, GH ;

WOOLLAM, JA ;

LIU, DC .

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BUABBUD, GH ;

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WOOLLAM, JA .

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[6] BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY [J].

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[7] HARD CARBON COATINGS WITH LOW OPTICAL-ABSORPTION [J].

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KOIDL, P .

APPLIED PHYSICS LETTERS, 1983, 42 (08) :636-638

[8] PROPERTIES OF CARBON-FILMS BY DC PLASMA DEPOSITION [J].

FUJII, K ;

SHOHATA, N ;

MIKAMI, M ;

YONEZAWA, M .

APPLIED PHYSICS LETTERS, 1985, 47 (04) :370-372

[9] THE EFFECTS OF HYDROGENATION ON THE PROPERTIES OF ION-BEAM SPUTTER DEPOSITED AMORPHOUS-CARBON [J].

JANSEN, F ;

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :605-609

[10] CHARACTERIZATION OF AMORPHOUS CARBON-HYDROGEN FILMS BY SOLID-STATE NUCLEAR MAGNETIC-RESONANCE [J].

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MACHONKIN, M .

APPLIED PHYSICS LETTERS, 1985, 47 (07) :750-753

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