DEVELOPMENT OF A SIMULATION ALGORITHM FOR ENERGY-SPECTRA OF ELASTIC RECOIL SPECTROMETRY

被引：11

作者：

TIRIRA, J ^{[1
]}

FRONTIER, JP ^{[1
]}

TROCELLIER, P ^{[1
]}

TROUSLARD, P ^{[1
]}

机构：

[1] CENS,CEA,INSTN,LAB VAN DE GRAAFF,F-91191 GIF SUR YVETTE,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 54卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(91)95534-K

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A general equation capable of describing the physical processes of proton elastic recoil induced by a low-energy He-4+ beam is proposed. A simulation algorithm for energy spectra is developed from the equation, which describes the physical processes occurring in the collision. The accuracy of the procedure is tested (on implanted silicon crystals and other hydrogenated targets) in microprobe mode using our computer program GABY. The method allows the hydrogen content and its depth profile in the near-surface region of solids to be determined in an absolute way.

引用

页码：328 / 333

页数：6

共 19 条

[1] COMPUTER-SIMULATION OF HELIUM-INDUCED FORWARD-RECOIL PROTON SPECTRA FOR HYDROGEN CONCENTRATION DETERMINATIONS [J].

BENENSON, RE ;

WIELUNSKI, LS ;

LANFORD, WA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :453-458

[2] On the decrease of velocity of swiftly moving electrified particles in passing through matter [J].

Bohr, N. .

PHILOSOPHICAL MAGAZINE, 1915, 30 (175-80) :581-612

[3]

DEARNALEY G., 1973, ION IMPLANTATION

[4]

GIBBONS JF, 1970, PROJECTED RANGE STAT

[5]

HERVING RL, 1988, 6TH P INT SIMS C VER

[6] NEW PRECISION TECHNIQUE FOR MEASURING CONCENTRATION VERSUS DEPTH OF HYDROGEN IN SOLIDS [J].

LANFORD, WA ;

TRAUTVETTER, HP ;

ZIEGLER, JF ;

KELLER, J .

APPLIED PHYSICS LETTERS, 1976, 28 (09) :566-568

[7] SMALL-ANGLE MULTIPLE-SCATTERING OF IONS IN SCREENED COULOMB REGION .2. LATERAL SPREAD [J].

MARWICK, AD ;

SIGMUND, P .

NUCLEAR INSTRUMENTS & METHODS, 1975, 126 (03) :317-323

[8] SCATTERING OF PROTONS FROM HELIUM AND LEVEL PARAMETERS IN LI-5 [J].

MILLER, PD ;

PHILLIPS, GC .

PHYSICAL REVIEW, 1958, 112 (06) :2043-2047

[9] LARGE DEPTH PROFILE MEASUREMENTS OF D, HE-3, AND LI-6 BY DEUTERON INDUCED NUCLEAR-REACTIONS [J].

MOLLER, W ;

HUFSCHMIDT, M ;

KAMKE, D .

NUCLEAR INSTRUMENTS & METHODS, 1977, 140 (01) :157-165

[10] HYDROGEN AND DEUTERIUM MEASUREMENTS BY ELASTIC RECOIL DETECTION USING ALPHA-PARTICLES [J].

PASZTI, F ;

KOTAI, E ;

MEZEY, G ;

MANUABA, A ;

POCS, L ;

HILDEBRANDT, D ;

STRUSNY, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :486-491

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