CRYSTALLOGRAPHIC ASPECTS OF THIN PTSI FILMS ON SI SUBSTRATES

被引：9

作者：

RICHARDS, BP ^{[1
]}

SCOBEY, IH ^{[1
]}

WALLACE, CA ^{[1
]}

机构：

[1] GEC, HIRST RES CTR, CENT RES LABS, WEMBLEY, ENGLAND

来源：

JOURNAL OF APPLIED CRYSTALLOGRAPHY | 1974年 / 7卷 / APR1期

关键词：

D O I：

10.1107/S0021889874009526

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：275 / 280

页数：6

共 13 条

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