SURFACE ORIENTATION DEPENDENT SURFACE KINETICS AND INTERFACE ROUGHENING IN MOLECULAR-BEAM EPITAXIAL-GROWTH OF III-V-SEMICONDUCTORS - A MONTE-CARLO STUDY

被引:41
作者
SINGH, J [1 ]
MADHUKAR, A [1 ]
机构
[1] UNIV SO CALIF,DEPT PHYS,LOS ANGELES,CA 90089
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.582546
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:305 / 312
页数:8
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