CHEMICAL AMPLIFICATION IN THE DESIGN OF DRY DEVELOPING RESIST MATERIALS

被引：519

作者：

ITO, H

WILLSON, CG

机构：

来源：

关键词：

D O I：

10.1002/pen.760231807

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：1012 / 1018

页数：7

共 22 条

[1] POLYMERIZATION OF AROMATIC ALDEHYDES .2. CATIONIC CYCLOPOLYMERIZATION OF PHTHALALDEHYDE
ASO, C
TAGAMI, S
KUNITAKE, T
[J]. JOURNAL OF POLYMER SCIENCE PART A-1-POLYMER CHEMISTRY, 1969, 7 (2PA1): : 497 - &
[2] PHOTO-POLYMERIZATION OF 1,2-EPOXYPROPANE AND 1,2-EPOXYBUTANE BY ARENEDIAZONIUM SALTS - EVIDENCE FOR ANION DEPENDENCE OF THE EXTENT OF POLYMERIZATION
BAL, TS
COX, A
KEMP, TJ
PINOTDEMOIRA, P
[J]. POLYMER, 1980, 21 (04) : 423 - 428
[3] VAPOR DEVELOPMENT OF POLY(OLEFIN SULFONE) RESISTS
BOWDEN, MJ
THOMPSON, LF
[J]. POLYMER ENGINEERING AND SCIENCE, 1974, 14 (07) : 525 - 528
[4] Chambers W. J., 1978, [No title captured], Patent No. [U.S. Patent 4,108,839, 4108839]
[5] Crivello J.V., 1979, ACS SYM SER, V114, P1, DOI [10.1021/bk-1979-0114.ch001, DOI 10.1021/BK-1979-0114.CH001]
[6] DUBOIS J, 1978, 8TH P S EL ION BEAM, P940
[7] FECH J, 1976, Patent No. 3940507
[8] FRECHET JMJ, 1982, MICROCIRCUIT ENG 82
[9] ALL DRY LITHOGRAPHY PROCESSES AND MECHANISTIC STUDIES WITH POLY(METHACRYLONITRILE) AND RELATED POLYMERS
HIRAOKA, H
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (05) : 1065 - 1071
[10] Ito H., 1982, 1982 S VLSI TECHN