GENERATION OF 100-MHZ-BAND RAYLEIGH-WAVES BY PHASE-VELOCITY SCANNING OF A LASER INTERFERENCE FRINGE

被引：6

作者：

NISHINO, H ^{[1
]}

TSUKAHARA, Y ^{[1
]}

NAGATA, Y ^{[1
]}

KODA, T ^{[1
]}

YAMANAKA, K ^{[1
]}

机构：

[1] TOPPAN PRINTING CO LTD,TECH RES INST,SAITAMA 345,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 5B期

关键词：

PHASE VELOCITY SCANNING METHOD; INTERFERENCE FRINGE; THERMOELASTIC EFFECT; RAYLEIGH WAVES; NONDESTRUCTIVE EVALUATION;

D O I：

10.1143/JJAP.32.2536

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated the thermoelastic generation of Rayleigh waves in the 100 MHz frequency range using a scanning interference fringe (SIF) obtained by intersecting two laser beams with different frequencies. A long-pulse (140 ns) Q-switched Nd:YAG laser was used to generate Rayleigh waves on an aluminum specimen at various scanning velocities controlled by the intersection angle of the laser beams. It was found that the amplitude of the generated tone burst of Rayleigh waves followed a sinc function dependence over the scanning velocity with a peak at the Rayleigh wave velocity. The center frequency of the tone burst followed a linear dependence. Implications of these findings in the quantitative nondestructive evaluation of microdevice components are discussed.

引用

页码：2536 / 2539

页数：4

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