INPLANE ORIENTATIONS AND GRAIN-BOUNDARIES OF YBA2CU3O7-X THIN-FILMS ON (001)MGO SUBSTRATES GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:22
作者
SUZUKI, H
FUJIWARA, Y
HIROTSU, Y
YAMASHITA, T
OIKAWA, T
机构
[1] NAGAOKA UNIV TECHNOL,DEPT MECH ENGN,NAGAOKA 94021,JAPAN
[2] JEOL LTD,TOKYO 196,JAPAN
[3] TOHOKU UNIV,ELECT COMMUN RES INST,SENDAI,MIYAGI 980,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 04期
关键词
YBCO THIN FILM; MGO SUBSTRATE; MOCVD; TEM OBSERVATION; X-RAY DIFFRACTION; TEM MICROBEAM ANALYSIS; GRAIN BOUNDARY STRUCTURE; INPLANE ORIENTATION; JOSEPHSON EFFECT;
D O I
10.1143/JJAP.32.1601
中图分类号
O59 [应用物理学];
学科分类号
摘要
Growth orientations and structures of YBa2Cu3O7-x (YBCO) thin films on (001) MgO substrates formed by metalorganic chemical vapor deposition (MOCVD) were investigated by means of X-ray diffraction, and plan-view and cross-sectional transmission electron microscopy (TEM). Less than half of the films are epitaxially grown (001)-oriented films, and the rest are films composed of epitaxial grains and in-plane misoriented grains with specific misorientation angles. Cross-sectional TEM revealed that the in-plane misoriented grains are grown on a flat MgO surface, while the epitaxially oriented grains are grown on MgO with surface atomic steps as large as 1 nm. The misoriented films are composed of large grains several mum in size with large-angle grain boundaries (LAGBs), and each grain contains several small grains less than 1 mum in size with slight mutual misorientations. A clear Josephson effect was observed from the films with the LAGBs. From the lattice imaging, it was found that the LAGBs tend to form lower SIGMA structures. A TEM microbeam analysis revealed an oxygen deficiency at the LAGBs.
引用
收藏
页码:1601 / 1611
页数:11
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