METAL ALKOXIDES AS PRECURSORS FOR ELECTRONIC AND CERAMIC MATERIALS

The metal alkoxides M(OR)x (M = a metal of valency x; R = alkyl or aryl group) are excellent precursors for the deposition of metal oxides, and current interest in using metal oxides in optoelectronics, high-Tc superconductors, and ceramics has led to a resurgence of interest in the chemistry of these compounds. This article covers those aspects of the chemistry of metal alkoxides that are particularly relevant to the use of these compounds a precursors for metal oxides in the electronics and ceramics industries. This will entail a short section of the preparation and purification of metal alkoxide followed by sections on structure and volatility, oxide alkoxide intermediates, the MOCVD technique, and the sol-gel technique.