UV-OZONE CLEANING OF GAAS FOR MBE

被引：46

作者：

MCCLINTOCK, JA

WILSON, RA

BYER, NE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 02期

关键词：

D O I：

10.1116/1.571365

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：241 / 242

页数：2

共 7 条

[1]

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[4]

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IEEE TRANSACTIONS ON PARTS HYBRIDS AND PACKAGING, 1976, 12 (04) :365-370

[6] CORRELATION OF SHORT-RANGE ORDER AND SPUTTER DOSE IN GAAS(110) USING A VIDICON-BASED LEED SYSTEM [J].

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[7] MOLECULAR-BEAM EPITAXIAL GAAS LAYERS FOR MESFETS [J].

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APPLIED PHYSICS LETTERS, 1976, 29 (11) :746-748

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