TEMPERING EFFECTS IN ION-PLATED TIN FILMS - TEXTURE, RESIDUAL-STRESS, ADHESION AND COLOR

被引:39
作者
PERRY, AJ [1 ]
机构
[1] INST STRAUMANN,CH-4437 WALDENBURG,SWITZERLAND
关键词
ADHESION; -; FILMS; Stresses; METALLOGRAPHY; Textures; X-RAYS; Diffraction;
D O I
10.1016/0040-6090(87)90218-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The contraction of the expanded crystal lattice, inherent in films made by plasma-enhanced vapor deposition, occurs on tempering with an activation energy of about 2. 09 ev and is accompanied in the present films by an increase in residual stress and the development of a texture in the plane of the film. The intrinsic stress falls so the net stress increase is attributed to a concomitant substrate contraction. At the same time the color of the films becomes more deeply yellow in accordance with recent discussion of the simple ionic model. The scratch test adhesion is not significantly affected by the tempering and the increase in the residual stress. Indeed, adhesion increases slightly with tempering probably owing to interdiffusion with the substrate.
引用
收藏
页码:165 / 174
页数:10
相关论文
共 33 条
[1]   FUTURE POTENTIAL DEVELOPMENTS IN HARD MATERIALS [J].
ALMOND, EA .
POWDER METALLURGY, 1982, 25 (03) :146-152
[2]  
AUBRY A, 1985, THESIS TU COMPIEGNE
[3]   THE STRESS IN ION-PLATED HFN AND TIN COATINGS [J].
CHOLLET, L ;
PERRY, AJ .
THIN SOLID FILMS, 1985, 123 (03) :223-234
[4]  
CHOLLET L, 1985, J MATER ENERG SYST, V6, P293
[5]  
DAMASK AC, 1963, POINT DEFECTS METALS, P148
[6]   EVALUATION OF (RESIDUAL) STRESSES IN TEXTURED CUBIC METALS [J].
DOLLE, H ;
COHEN, JB .
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1980, 11 (05) :831-836
[7]   INFLUENCE OF MULTIAXIAL STRESS STATES, STRESS GRADIENTS AND ELASTIC-ANISOTROPY ON THE EVALUATION OF (RESIDUAL) STRESSES BY X-RAYS [J].
DOLLE, H .
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1979, 12 (DEC) :489-501
[8]   THE PHASE RELATIONSHIP AND DENITRIFICATION DURING THE SINTERING PROCESS OF TIN-NI MIXED POWDER COMPACTS [J].
FUKUHARA, M ;
MITANI, H .
TRANSACTIONS OF THE JAPAN INSTITUTE OF METALS, 1980, 21 (04) :211-218
[9]  
HINTERMANN HE, 1983, 1983 P INT ION ENG C, P1115
[10]  
JANOWSKI S, 1984, METALOZN OBROBKA CIE, V67, P14