ON THE DIFFERENCES BETWEEN A-SIC-H FILMS DEPOSITED WITH AND WITHOUT FLUORINE

被引：28

作者：

MAHAN, AH

WILLIAMSON, DL

RUTH, M

RABOISSON, P

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷

关键词：

D O I：

10.1016/0022-3093(85)90796-3

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：861 / 864

页数：4

共 19 条

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