THE INFLUENCE OF ORIENTED GROWTH ON THE SURFACE-ROUGHNESS OF CVD DIAMOND FILMS

被引：12

作者：

NORGARD, C ^{[1
]}

ESKILDSEN, SS ^{[1
]}

MATTHEWS, A ^{[1
]}

机构：

[1] UNIV HULL,SURFACE ENGN RES CTR,KINGSTON HULL HU6 7RX,N HUMBERSIDE,ENGLAND

来源：

SURFACE & COATINGS TECHNOLOGY | 1995年 / 74-5卷 / 1-3期

关键词：

DIAMOND; HOT FILAMENT CVD; TEXTURED GROWTH; SURFACE ROUGHNESS; FRICTION;

D O I：

10.1016/0257-8972(95)08241-7

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Experiments and computer simulations were carried out which indicate that very smooth diamond surfaces can be grown without any subsequent polishing of the diamond surface using a two-step deposition technique. The first step is to grow a diamond film under conditions that will establish a (100) textured diamond film. The second step is to decrease the surface roughness by increasing the growth rate of the inclined {111} planes of the (100) textured film.

引用

页码：358 / 361

页数：4

共 5 条

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WILD, C ;

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