SCANNING ACCURACY OF MOVING-IRON GALVANOMETER SCANNER

被引：7

作者：

BROSENS, P ^{[1
]}

机构：

[1] GEN SCANNING INC, WATERTOWN, MA 02172 USA

来源：

关键词：

D O I：

10.1117/12.7971926

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：95 / 98

页数：4

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