THIN-FILM OF CERAMIC OXIDES BY MODIFIED CVD

被引:17
作者
DESCHANVRES, JL
CELLIER, F
DELABOUGLISE, G
LABEAU, M
LANGLET, M
JOUBERT, JC
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来源
JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
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D O I
10.1051/jphyscol:1989582
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页码:695 / 705
页数:11
相关论文
共 13 条
[1]  
GREENE JE, 1977, J VAC SCI TECHNOL, V14, P177, DOI 10.1116/1.569116
[2]  
Guinier A., 1964, THEORIE TECHNIQUE RA, P462
[3]  
HAGENMULLER P, 1978, SOLID ELECTROLYTES, P294
[4]  
LANTERI V, 1984, ADV CERAM, V12, P119
[5]   MODEL FOR COLUMNAR MICROSTRUCTURE OF THIN SOLID FILMS [J].
LICHTER, S ;
CHEN, J .
PHYSICAL REVIEW LETTERS, 1986, 56 (13) :1396-1399
[6]  
Rayleigh J.W.S, 1945, THEORY SOUND, VII, P344
[7]  
SPITZ J, 1974, Patent No. 1362803
[8]  
SPITZ J, 1975, Patent No. 3890391
[9]  
SPITZ J, 1975, Patent No. 3880112
[10]  
SPITZ J, 1974, Patent No. 2151809