DEPOSITION OF METALLIC-FILMS BY LASER-ABLATION OF OXIDES IN HYDROGEN ATMOSPHERE

被引:3
作者
OGALE, SB
JOSHI, S
BILURKAR, PG
MATE, N
机构
[1] Center for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona
关键词
D O I
10.1063/1.355144
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pulsed laser ablation from oxide surfaces in hydrogen atmosphere is shown to be a powerful new method for deposition of high quality metal films. Specifically, the cases of ablation from CuO and alpha-Fe2O3 are studied. By examining the effects of hydrogen pressure, laser energy density, and the substrate temperature on the nature of the deposited films, optimum parameters have been identified for realization of high quality films of metallic Cu and Fe.
引用
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页码:6418 / 6421
页数:4
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